Company Filing History:
Years Active: 2003-2004
Title: The Innovative Contributions of Eric A Joseph
Introduction
Eric A Joseph is a notable inventor based in Dallas, TX (US), recognized for his contributions to semiconductor technology. He holds 2 patents that showcase his expertise in lithographic methods and polysilicon processing. His work has significantly impacted the field of semiconductor manufacturing.
Latest Patents
One of Eric's latest patents is focused on polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography. This lithographic method involves forming submicron polysilicon features on a semiconductor substrate. The process includes coating the substrate with an anti-reflective coating (ARC) that consists of two layers with matched indices of refraction and extinction coefficients. This design aims to reduce reflection to less than 1% during 193 nm wavelength exposure. The ARC is then patterned to serve as an etch hardmask, with the first layer comprising silicon-rich silicon nitride and the second layer made of silicon oxynitride.
Career Highlights
Eric A Joseph is currently employed at Texas Instruments Corporation, where he continues to innovate in the field of semiconductor technology. His work at Texas Instruments has allowed him to collaborate with other talented professionals in the industry.
Collaborations
Some of Eric's notable coworkers include Gautam V Thakar and Reima Tapani Laaksonen. Their collaborative efforts contribute to the advancement of technology within their field.
Conclusion
Eric A Joseph's contributions to semiconductor technology through his patents and work at Texas Instruments Corporation highlight his role as an influential inventor. His innovative methods in lithography and polysilicon processing continue to shape the future of semiconductor manufacturing.