Company Filing History:
Years Active: 1998
Title: Elvis Huang - Innovator in Wafer Cooling Technology
Introduction
Elvis Huang is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of wafer cooling processes. His innovative approach has the potential to enhance production efficiency and reduce costs in the industry.
Latest Patents
Elvis Huang holds a patent for a method of in-situ wafer cooling for a sequential WSi/α-Si sputtering process. This invention relates to a method that improves the sputtering process of tungsten silicide (WSi) and α-silicon (α-Si) in a multi-chamber sputtering apparatus. The method involves cooling the wafer using inert gas before the α-Si sputtering begins. This technique not only saves time by reducing the vacuuming and venting phases but also minimizes the risk of wafer contamination and lowers fabrication costs.
Career Highlights
Elvis Huang is currently employed at Mosel Vitelic Corporation, where he continues to develop innovative solutions in semiconductor technology. His work has been instrumental in advancing the efficiency of sputtering processes, which are critical in the production of integrated circuits.
Collaborations
Elvis has collaborated with esteemed colleagues such as Hsien-Liang Meng and Pei-Jan Wang. Their combined expertise contributes to the innovative environment at Mosel Vitelic Corporation, fostering advancements in semiconductor manufacturing.
Conclusion
Elvis Huang's contributions to wafer cooling technology exemplify the impact of innovation in the semiconductor industry. His patent reflects a commitment to improving production processes and reducing costs, showcasing the importance of inventors in driving technological progress.