Lexington, MA, United States of America

Edwin M Kellogg


Average Co-Inventor Count = 5.0

ph-index = 1

Forward Citations = 44(Granted Patents)


Company Filing History:


Years Active: 1987

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1 patent (USPTO):Explore Patents

Title: Edwin M. Kellogg: Innovator in Substrate Alteration Technology

Introduction

Edwin M. Kellogg is a notable inventor based in Lexington, MA (US), recognized for his contributions to the field of substrate alteration technology. With a focus on precision and innovation, he has developed methods that enhance the capabilities of materials used in various applications.

Latest Patents

Kellogg holds a patent for "Augmented carbonaceous substrate alteration." This invention involves accurately altering a precisely located site on a substrate through a series of steps, including the use of a vacuum chamber, an energy beam, and a hydrocarbon source. The process allows for the creation of a coherent carbonaceous deposit that adheres to the substrate, rendering it opaque. This technology is particularly useful in repairing defects in photolithographic masks using a focused ion beam.

Career Highlights

Kellogg is associated with Ion Beam Systems, Inc., where he applies his expertise in substrate alteration. His innovative approach has positioned him as a key figure in advancing technologies that rely on precise material modifications.

Collaborations

Throughout his career, Kellogg has worked alongside talented individuals such as John M. Dobbs and Gregory J. Dunn. These collaborations have contributed to the development of cutting-edge technologies in the field.

Conclusion

Edwin M. Kellogg's work in substrate alteration technology exemplifies the impact of innovation in material science. His patent and collaborations highlight his commitment to advancing the field and addressing complex challenges in technology.

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