Company Filing History:
Years Active: 2000-2001
Title: Innovations by Donald H Langhans in Substrate Handling Technology
Introduction
Donald H Langhans is a notable inventor based in Palo Alto, CA (US). He has made significant contributions to the field of substrate handling technology, holding a total of 2 patents. His work primarily focuses on enhancing the efficiency and reliability of semiconductor processing and flat panel display systems.
Latest Patents
Langhans' latest patents include an innovative end effector for substrate handling. This end effector features a tower with non-stacked spatulas, designed to avoid tolerance stacking by incorporating grooves relative to a common reference surface. The spatulas are mounted in these grooves, which are provided in separate planar walls of the tower. The intersecting walls enhance the structural properties of the tower. Additionally, the tower includes a dual-purpose clamp that is formed integrally with one wall, facilitating both the assembly of the tower and spatulas, as well as the mounting of the completed end effector in a load lock. The spatula is capable of carrying a wafer during various operations, such as semiconductor processing, material deposition, and etching systems. Notably, the design accounts for equipment vibrations, ensuring that the resonant frequency of the spatula while carrying the wafer is outside the range of these vibrations.
Career Highlights
Langhans is currently associated with Lam Research Corporation, where he continues to innovate in the field of substrate handling. His work has been instrumental in advancing technologies that support the semiconductor manufacturing process.
Collaborations
Some of his notable coworkers include Edmund Leung Ma and Christopher O Lada, who have collaborated with him on various projects within the company.
Conclusion
Donald H Langhans has made remarkable contributions to substrate handling technology, particularly through his innovative patents. His work continues to influence the semiconductor industry and improve manufacturing processes.