Company Filing History:
Years Active: 2019-2023
Title: David Ullstrom: Innovator in Electrostatic Chuck Technology
Introduction
David Ullstrom is a prominent inventor based in San Jose, California. He has made significant contributions to the field of substrate processing technology, particularly through his innovative patents. With a total of 2 patents, Ullstrom has established himself as a key figure in the industry.
Latest Patents
Ullstrom's latest patents focus on the development of azimuthally tunable multi-zone electrostatic chucks. These implementations provide a method for processing a substrate on a substrate support assembly, enabling both lateral and azimuthal tuning of heat transfer between the electrostatic chuck and the substrate. The method involves processing a first substrate using a specific temperature profile on the substrate support assembly, which includes primary heaters and spatially tunable heaters. A deviation profile is determined from the results of processing the first substrate, allowing for adjustments to be made to optimize the temperature profile for subsequent substrates.
Career Highlights
David Ullstrom is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has been instrumental in advancing technologies that enhance substrate processing efficiency and precision.
Collaborations
Ullstrom has collaborated with notable colleagues, including Chunlei Zhang and Phillip A Criminale. These partnerships have contributed to the innovative developments in electrostatic chuck technology.
Conclusion
David Ullstrom's contributions to the field of substrate processing through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the semiconductor industry positively.