Company Filing History:
Years Active: 1999-2001
Title: Innovations of Chris Cha in Sputter Deposition Technology
Introduction
Chris Cha is an accomplished inventor based in Sunnyvale, CA, with a focus on advanced sputter deposition techniques. He holds 2 patents that contribute significantly to the field of barrier layer structures in semiconductor manufacturing. His work emphasizes the importance of process conditions and layer order in achieving optimal barrier properties.
Latest Patents
Chris Cha's latest patents include innovative methods for creating sputter deposited barrier layers. The first patent details a process where various film layers are deposited in a specific order using a combination of Ion Metal Plasma (IMP) and traditional sputter deposition techniques. This method allows for effective metal/conductor filling of contact sizes down to 0.25 microns without junction spiking. The layers are deposited in the following order: a first layer of barrier metal (M) by IMP sputter deposition, followed by an oxygen-stuffed barrier metal (MOx) or a nitride of a barrier metal (MNOx), a third layer of nitride of a barrier metal (MN.sub.x) by IMP sputter deposition in the presence of nitrogen, and finally, a wetting layer of barrier metal deposited by traditional sputter deposition. The process also includes optional annealing to form a silicide of the barrier metal to reduce contact resistance.
Career Highlights
Chris Cha is currently employed at Applied Materials, Inc., where he continues to innovate in the field of semiconductor technology. His contributions have been pivotal in enhancing the performance and reliability of barrier layers in electronic devices.
Collaborations
Chris has collaborated with notable colleagues, including Edwin Kim and Michael Nam, to further advance the research and development of sputter deposition techniques.
Conclusion
Chris Cha's innovative work in sputter deposition technology showcases his expertise and commitment to improving semiconductor manufacturing processes. His patents reflect a deep understanding of material science and engineering principles, making significant contributions to the industry.
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