Chin-Chuan Chang

Title: **Innovator Profile: Chin-Chuan Chang**

Introduction

Chin-Chuan Chang is a prominent inventor based in Los Altos, CA, recognized for his significant contributions to the field of semiconductor processing. With a total of three patents to his name, Chang has paved the way for advancements in plasma cluster tools, which are essential for efficient substrate processing in the semiconductor industry.

Latest Patents

Chang's latest patents focus on innovative methods for configuring plasma cluster tools. One notable patent describes a method that includes generating a key file from option specifications. This key file encapsulates configuration restrictions specifically imposed on the plasma cluster tool. The process also involves generating at least one system-wide configuration file and one component-level configuration file utilizing the key file. Additionally, the method generates run-time executable objects from a database of option definition files, system-wide configuration files, and component-level configuration files. Ultimately, these executable objects are employed to configure the plasma cluster tool, showcasing Chang's ingenuity in enhancing the functionality and efficiency of semiconductor processing equipment.

Career Highlights

Chin-Chuan Chang is currently associated with Lam Research Corporation, a leader in semiconductor manufacturing equipment. His innovative work at Lam Research has had a significant impact on the industry, allowing for enhanced precision and reliability in semiconductor fabrication processes.

Collaborations

Throughout his career, Chang has collaborated with esteemed coworkers such as Chung-Ho Huang and Shih-Jeun Fan. These partnerships have fostered an environment of innovation and have contributed to the development of cutting-edge technologies in substrate processing.

Conclusion

In conclusion, Chin-Chuan Chang stands out as an influential inventor in the semiconductor industry. With his innovative patents and collaborative efforts at Lam Research Corporation, Chang continues to push the boundaries of technology, contributing to advancements that will shape the future of semiconductor manufacturing. His work exemplifies the spirit of innovation that drives progress across industries.