Location History:
- Strongsville, OH (US) (2009)
- Parma Heights, OH (US) (2012)
Company Filing History:
Years Active: 2009-2012
Title: Chien-Hung Wu: Innovator in Silicon Carbide MEMS Technology
Introduction
Chien-Hung Wu is a notable inventor based in Parma Heights, OH (US). He has made significant contributions to the field of microelectromechanical systems (MEMS), particularly through his innovative work with silicon carbide materials. With a total of 2 patents, Wu's inventions are paving the way for advancements in various applications.
Latest Patents
Wu's latest patents include "Silicon carbide MEMS structures and methods of forming the same." This patent describes MEMS structures that incorporate silicon carbide micromechanical components. These components can be integrated with electronic elements that control or detect the movement of the micromechanical parts. The MEMS structures developed by Wu are applicable in a range of fields, including microsensors and microactuators. Another significant patent is "Doping of SiC structures and methods associated with same." This invention focuses on doped silicon carbide structures, which serve as components in MEMS devices. The structures are designed to be highly conductive, offering low resistance to electrical current. An in-situ doping process is utilized to create these structures, ensuring they maintain desired dimensions with minimal distortion from residual stress or strain gradient. The high conductivity and mechanical integrity of these structures provide substantial advantages in MEMS applications.
Career Highlights
Throughout his career, Chien-Hung Wu has worked with esteemed institutions such as Case Western Reserve University and Flx Micro, Inc. His expertise in silicon carbide technology has positioned him as a key figure in the MEMS field.
Collaborations
Wu has collaborated with various professionals, including his coworker Jeffrey M Melzak, to further enhance the development of MEMS technologies.
Conclusion
Chien-Hung Wu's contributions to silicon carbide MEMS technology are noteworthy and impactful. His innovative patents and career achievements reflect his dedication to advancing the field of microelectromechanical systems.