Company Filing History:
Years Active: 2003-2007
Title: Innovations by Inventor Charlie Lee
Introduction
Charlie Lee is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of photoresist technology, holding a total of 3 patents. His work focuses on enhancing the selectivity and efficiency of photoresist materials used in semiconductor manufacturing.
Latest Patents
One of Charlie Lee's latest patents is titled "Method for argon plasma induced ultraviolet light curing step for increasing silicon-containing photoresist selectivity." This method aims to improve the etching selectivity of a developed silicon-containing photoresist layer on a substrate. The process involves exposing the developed photoresist layer to ultraviolet (UV) light generated from various gases in an inert gas plasma, resulting in a hardened layer that enhances etching performance.
Another significant patent is "Plasma enhanced method for increasing silicon-containing photoresist selectivity." This method initiates with a substrate that has a developed photoresist layer containing a hardening agent. The substrate is then exposed to a gas that interacts with the hardening agent, converting a portion of the photoresist layer into a hardened layer. This innovation offers improved etch profile control and streamlines fabrication steps, enhancing wafer throughput.
Career Highlights
Charlie Lee is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has allowed him to apply his innovative methods in real-world applications, contributing to advancements in the industry.
Collaborations
Charlie collaborates with talented coworkers, including Francis Ko and Sandy Chen. Their combined expertise fosters a creative environment that drives innovation in their projects.
Conclusion
Charlie Lee's contributions to photoresist technology exemplify the impact of innovation in the semiconductor industry. His patents reflect a commitment to improving manufacturing processes and enhancing product quality.