Company Filing History:
Years Active: 2020
Title: Changwoo Song: Innovator in Low-Temperature Etching Technologies
Introduction
Changwoo Song, an accomplished inventor based in Uijeongbu-si, South Korea, has made significant contributions to the field of semiconductor manufacturing. With a keen focus on low-temperature etching processes, Song's innovative techniques have advanced the capabilities of plasma etching technology.
Latest Patents
Changwoo Song holds a notable patent titled "Method of etching at low temperature and plasma etching apparatus." This invention involves a method of etching that includes cooling a pedestal on which a wafer is disposed, etching the wafer by generating plasma from gas supplied through a gas distribution unit, and injecting a heated inert gas into the chamber through the same distribution unit. Such advancements in etching technology are crucial for enhancing the efficiency and effectiveness of semiconductor fabrication.
Career Highlights
As a key member of Samsung Electronics Co., Ltd., Changwoo Song has played a pivotal role in developing cutting-edge technologies that are essential in today's electronic devices. His work at Samsung is indicative of the company’s commitment to innovation and leadership in the technology sector.
Collaborations
Throughout his career, Changwoo Song has collaborated with talented peers, including Cheonkyu Lee and Moonseok Kim. Together, they have pursued excellence in research and development, contributing to the groundbreaking advancements in semiconductor technologies. These collaborations further highlight the dynamic and innovative environment at Samsung Electronics.
Conclusion
Changwoo Song's dedication to innovation and his contributions to low-temperature etching technologies exemplify the spirit of advancement within the semiconductor industry. His patent and collaborative efforts at Samsung Electronics Co., Ltd. underscore the importance of continued research and development in creating more efficient manufacturing processes. As technology evolves, inventors like Song continue to pave the way for future breakthroughs.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.