Company Filing History:
Years Active: 1996-1999
Title: Chang-Jin Sohn: Innovator in Photolithographic Systems
Introduction
Chang-Jin Sohn is a notable inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of photolithography, particularly in the development of advanced projection systems. With a total of 2 patents to his name, Sohn's work has implications for semiconductor manufacturing and related technologies.
Latest Patents
Sohn's latest patents include innovative designs for reflectors used in photolithographic projection systems. One patent discusses a photolithographic projection system that selectively irradiates a photosensitive layer on a wafer according to a predetermined mask pattern. This system features a radiation source that generates light, along with a reflector that directs this radiation onto the wafer. The reflector is designed with both a radiation reflecting portion and a phase-shifting, partially reflecting portion, enhancing the efficiency of the projection process.
Another patent focuses on a mask pattern for manufacturing resist patterns in semiconductor devices through photolithography. This mask pattern includes an additional design that prevents resist patterns from forming in specific areas, allowing for the creation of fine patterns with improved profiles. These innovations are crucial for advancing semiconductor technology.
Career Highlights
Chang-Jin Sohn is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of photolithographic technology. His work at this leading technology company has positioned him as a key player in the semiconductor industry.
Collaborations
Sohn has collaborated with notable colleagues, including Dong-Seon Lee and Woo-Sung Han. Their combined expertise contributes to the innovative projects at Samsung Electronics, fostering advancements in photolithography.
Conclusion
Chang-Jin Sohn's contributions to photolithographic systems exemplify the importance of innovation in semiconductor manufacturing. His patents reflect a commitment to enhancing technology and improving manufacturing processes.