Company Filing History:
Years Active: 2022
Title: The Innovative Contributions of Casey Jane Madsen
Introduction
Casey Jane Madsen is a notable inventor based in San Jose, California. She has made significant contributions to the field of semiconductor processing through her innovative patent. Her work focuses on enhancing the efficiency and effectiveness of plasma processing chambers.
Latest Patents
Madsen holds a patent for a "Coating for Chamber Particle Reduction." This invention relates to a chamber component used in plasma processing chambers for semiconductor or display processing. The patent describes a chamber component that features a textured surface with a surface roughness ranging from about 150 microinches to about 450 microinches. A coating layer is applied to this textured surface, which may consist of a silicon layer with a purity ranging from about 90 weight percent to about 99 weight percent. The thickness of the coating layer can vary from about 50 microns to about 500 microns, and it exhibits an electrical resistivity ranging from about 1 E-3 ohm*m to about 1 E3 ohm*m. This coating layer is designed to provide strong adhesion for materials deposited in the plasma processing chamber, thereby reducing the likelihood of materials peeling from the chamber component. Additionally, it enables oxygen plasma cleaning, further minimizing material deposits on the chamber component while protecting the underlying textured surface.
Career Highlights
Madsen is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her role involves developing innovative solutions that enhance the performance of semiconductor manufacturing processes. With her expertise, she has contributed to advancements that are crucial for the industry's growth.
Collaborations
Throughout her career, Madsen has collaborated with talented individuals such as Hsin-wei Tseng and Yikai Chen. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies.
Conclusion
Casey Jane Madsen's contributions to the field of semiconductor processing through her innovative patent demonstrate her commitment to advancing technology. Her work not only enhances the efficiency of plasma processing chambers but also showcases the importance of collaboration in driving innovation.