Carl C Gogol, Jr

Title: Carl C Gogol, Jr: Innovator in Wall Deposition Monitoring Systems

Introduction

Carl C Gogol, Jr. is a notable inventor based in Manlius, NY (US). He has made significant contributions to the field of monitoring systems, particularly in the area of wall deposition. His innovative approach has led to the development of a unique patent that addresses challenges in etch and deposition chambers.

Latest Patents

Gogol holds a patent for a "Wall Deposition Monitoring System." This system is designed to measure variations in wall deposit thickness within an etch or deposition chamber that contains a reactive environment. The invention utilizes at least one quartz or other piezoelectric crystal sensor, which is installed through the chamber wall using a feed-through member. The cover assembly retains the sensor in proximity to the chamber wall, allowing for accurate monitoring of the reactive environment. An oscillating device causes the sensor to resonate, and as processing occurs, a solid reaction product accumulates on the sensor, which dampens its vibration. A detection device then senses the frequency shift, enabling the calculation of the relative change in thickness for a given material. The assembly is constructed from non-reactive materials that are electrically and thermally conductive, making it suitable for highly reactive environments.

Career Highlights

Carl C Gogol, Jr. is currently employed at Leybold Inficon, Inc., where he continues to innovate and develop advanced technologies. His work has been instrumental in enhancing the efficiency and accuracy of monitoring systems used in various industrial applications.

Collaborations

Gogol collaborates with Mark F Kendrick, contributing to the advancement of technologies in their field. Their partnership exemplifies the importance of teamwork in driving innovation.

Conclusion

Carl C Gogol, Jr. is a distinguished inventor whose work in wall deposition monitoring systems has made a significant impact in the industry. His innovative patent reflects his commitment to advancing technology and improving processes in reactive environments.