18 Utility Patents
#61 in Jena
#10,076 in Germany
#194,883 in the World
Forward Citations = 1,392
Company Filing History:


Vistec Electron Beam Gmbh
4. 2 out of 33
Friedrich-schiller-universitaet Jena
5. 1 out of 20
Leica Microsystems Lithography Gmbh
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