Taipei, Taiwan

Arthur Chin


Average Co-Inventor Count = 3.0

ph-index = 1


Company Filing History:


Years Active: 1999

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1 patent (USPTO):Explore Patents

Title: The Innovations of Arthur Chin: A Pioneer in Reflective Coating Technology

Introduction: Arthur Chin, based in Taipei, Taiwan, is an inventor celebrated for his contributions to integrated circuit technology. With a focus on enhancing the capabilities of narrow aperture width patterns, Chin has made significant strides in the field of semiconductor manufacturing. He holds one patent that showcases his innovative approach to photoresist layers used in circuit design.

Latest Patents: Arthur Chin's notable patent is titled "Enhanced Reflectivity Coating (ERC) for Narrow Aperture Width Contact." This invention presents a method for forming a narrow aperture width patterned positive photoresist layer from a blanket positive photoresist layer specifically designed for integrated circuits. The process involves several critical steps, starting with the formation of a reflective layer over a semiconductor substrate. A blanket positive photoresist layer is then applied to this reflective layer. Through careful photoexposure using a reticle, the blanket layer is transformed into a photoexposed variant, which is subsequently developed to achieve a narrow aperture width pattern. This innovative technique not only reduces photoexposure energy but also addresses depth-of-focus limitations, leading to more efficient semiconductor manufacturing processes.

Career Highlights: Arthur Chin's career is marked by his influential work at Vanguard International Semiconductor Corporation, where he applies his expertise in semiconductor technology. His patent reflects his deep understanding of the challenges in photoresist applications, making him a significant figure in the ongoing evolution of integrated circuitry.

Collaborations: Throughout his career, Arthur Chin has worked alongside esteemed colleagues, including Sen-Huan Huang and Erik S. Jeng. Their collaborations highlight a team effort in advancing semiconductor technologies, with shared expertise driving innovation and creating impactful solutions in the field.

Conclusion: Arthur Chin stands out as a dedicated inventor whose work on the Enhanced Reflectivity Coating represents a critical development in semiconductor manufacturing. His contributions, supported by collaborative efforts with skilled colleagues, help pave the way for advancements in integrated circuit technologies that enhance the capabilities of electronic devices across various industries.

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