Location History:
- San Jose, CA (US) (1980)
- Cupertino, CA (US) (1993)
Company Filing History:
Years Active: 1980-1993
Title: Innovations by Arkadi Galicki in Sputtering Technologies
Introduction
Arkadi Galicki, an inventive mind based in Cupertino, CA, has made significant contributions to the field of sputtering technology. With two patents to his name, he has played a pivotal role in enhancing the processes used for producing thin films of material.
Latest Patents
Galicki's latest innovations include two remarkable patents. The first is a "Sputtering apparatus for producing thin films of material," which introduces a sophisticated design featuring a first electrode for supporting target material and a second electrode for substrate support. This apparatus includes a source of RF power that imposes an RF voltage to create a glow discharge between the electrodes. The unique shutter mechanism incorporated in the design plays a crucial role in controlling the flow of sputtered atoms, optimizing the deposition process on the substrate.
His second patent is a "Sputtering system for optimizing quartz deposition uniformity." This system is engineered to deposit quartz uniformly across multiple wafers processed in batches. It features an anode plate with multiple wafer locations, each designed with an angular bottom slope that ensures the wafers are tilted at the optimum angle for uniform deposition. This innovative approach guarantees consistent thickness of the quartz layer across varying wafer placements.
Career Highlights
Arkadi Galicki currently works at IBM (International Business Machines Corporation), where he applies his expertise in sputtering technology. His role contributes to the company's efforts in advancing materials processing techniques that are essential for various electronic applications.
Collaborations
Throughout his career, Galicki has collaborated with notable colleagues such as Carl P. Hayunga and Homi G. Sarkary. These collaborations have fostered advancements in sputtering technology, further enhancing the capabilities and efficiency of material deposition processes.
Conclusion
With his innovative patents and collaborative efforts, Arkadi Galicki continues to make a lasting impact on the field of sputtering technology. His work not only advances material science but also paves the way for future innovations in thin film applications across various industries.