Anil Kumar Tummanapelli

Title: The Innovations of Anil Kumar Tummanapelli

Introduction

Anil Kumar Tummanapelli is an accomplished inventor based in Singapore, SG, known for his contributions to the field of materials science. With a focus on innovative solutions for semiconductor manufacturing, he has made significant strides in developing new methods for depositing silicon nitride films.

Latest Patents

Tummanapelli holds a patent titled "Chalcogen precursors for deposition of silicon nitride." This inventive work involves chalcogen silane precursors and describes methods for depositing a silicon nitride (SiN) film on a substrate. The process can utilize sequential or simultaneous exposures to the chalcogen silane and a reactant, providing flexibility in manufacturing. Notably, the chalcogen silane may be substantially free of halogen, and the chalcogen elements can include sulfur (S), selenium (Se), and tellurium (Te).

Career Highlights

Anil Kumar Tummanapelli is affiliated with Applied Materials, Inc., a leading company in the materials engineering sector. His role at the company involves pushing the boundaries of technology in semiconductor fabrication, where his expertise in chalcogen precursors elevates the development of advanced materials.

Collaborations

Throughout his career, Tummanapelli has worked closely with other talented professionals, including Chandan Kr Barik and Michael G Haverty. These collaborations have fostered innovation and significantly contributed to their mutual field, demonstrating the power of teamwork in advancing technology.

Conclusion

Anil Kumar Tummanapelli exemplifies the pursuit of innovation in materials science with his unique approach to semiconductor manufacturing. His patented methodologies present exciting opportunities for the industry, reflecting the crucial role of inventors in driving technological advancements.