Langhorne, PA, United States of America

Alvaro Maury


Average Co-Inventor Count = 2.4

ph-index = 2

Forward Citations = 25(Granted Patents)


Location History:

  • Langhorne, PA (US) (1986)
  • Wescosville, PA (US) (1989)

Company Filing History:


Years Active: 1986-1989

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2 patents (USPTO):Explore Patents

Title: Alvaro Maury: A Pioneer in Thin Dielectric Layer Innovations

Introduction: Alvaro Maury, an accomplished inventor based in Langhorne, PA, holds two patents that reflect his significant contributions to the field of semiconductor technology. His innovative work particularly focuses on methods for creating thin dielectric layers, which are essential for various electronic devices.

Latest Patents: Alvaro’s most recent patents include a method for making devices that utilize thin dielectric layers. This technique is crucial for producing high-quality dielectric layers that measure less than 25 nanometers and are formed on deposited silicon layers. Such advancements are particularly applicable in capacitor dielectrics within dynamic memories and linear devices. His pioneering approach employs rapid thermal oxidation to oxidize amorphous silicon under specific conditions, thus producing a higher quality oxide compared to traditional furnace oxidation methods.

Another noteworthy patent involves an ethylene glycol etch for processes involving metal silicides. This innovative etchant, a mixture of ethylene glycol and hydrofluoric acid, particularly benefits the etching of titanium silicide—a material he found can effectively replace tantalum silicide in semiconductor integrated circuits. This development enhances the functionality of interconnects and gates used in such circuits.

Career Highlights: Throughout his distinguished career, Alvaro Maury has worked at several prestigious organizations, including AT&T Bell Laboratories and American Telephone & Telegraph Company. His experience in these leading companies has enabled him to make significant strides in semiconductor technology and innovation.

Collaborations: Alvaro has collaborated with other notable professionals in his field, including Louis C Parrillo and Sea-Chung Kim, whose joint efforts have likely contributed to the effectiveness and success of his patented technologies.

Conclusion: Alvaro Maury exemplifies the spirit of innovation within the semiconductor industry. His patents not only showcase his inventiveness but also the critical need for high-quality materials in modern electronics. As technology continues to evolve, Alvaro's contributions provide a foundation for future advancements in the field.

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