Company Filing History:
Years Active: 2000-2003
Title: Innovations by Allan Doley in Semiconductor Technology
Introduction
Allan Doley is a notable inventor based in Phoenix, AZ (US), recognized for his contributions to semiconductor technology. He holds 2 patents that focus on reducing particles in reactors, which is crucial for maintaining the integrity of semiconductor manufacturing processes.
Latest Patents
Doley's latest patents include the "Substrate Handling Chamber" and the "System and Method for Reducing Particles in Epitaxial Reactors." The Substrate Handling Chamber is designed to minimize particle contamination in reactors. It features an enclosure with a wafer handling chamber connected to a processing chamber via an isolation gate valve. The apparatus employs pipes to deliver purge gas, effectively eliminating particles from the enclosure. A pilot-operated back pressure regulator manages the delivery and removal of the purge gas, while a Bernoulli wand is utilized for lifting and holding individual semiconductor wafers. The system also incorporates ionizers to discharge static electricity, preventing wafers from being attracted to one another.
The second patent, the System and Method for Reducing Particles in Epitaxial Reactors, shares similar features with the first. It includes an enclosure for processing semiconductor wafers, a wafer handling chamber, and an isolation gate valve. The apparatus also utilizes a Bernoulli wand and a dome-loaded regulator to control gas flow rates. The innovative use of an alpha particle emission source in the purge gas line ionizes gas molecules, ensuring that static charges are eliminated within the semiconductor equipment.
Career Highlights
Allan Doley has made significant strides in the semiconductor industry through his work at Asm America, Inc. His inventions have contributed to advancements in the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
Doley has collaborated with notable colleagues, including Dennis L. Goodwin and Kenneth O'Neill, who have also made significant contributions to the field.
Conclusion
Allan Doley's innovative patents and contributions to semiconductor technology highlight his expertise and commitment to improving manufacturing processes. His work continues to influence the industry positively.