Alan V Hayes

Title: Alan V Hayes: Innovator in Ion Beam Technology

Introduction

Alan V Hayes is a prominent inventor based in San Jose, California. He has made significant contributions to the field of ion beam technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and uniformity of ion beam applications, which are crucial in various technological processes.

Latest Patents

One of his latest patents is titled "Ion extraction optics having non uniform grid assembly." This invention involves a method that includes receiving a beam profile function derived from the beam density of an ion beam along a substrate plane. The method generates a mirror function based on the beam profile function, ensuring a flat beam distribution. Additionally, it calculates a normalized beam current as a function of hole location for an electrode assembly, ultimately generating an electrode assembly with an array of holes.

Another notable patent is "Plasma shaper to control ion flux distribution of plasma source." This invention provides approaches for achieving a more uniform ion flux and ion angular distribution across a wafer. The system includes a plasma source that generates plasma within a chamber, featuring a plasma shaper that extends into the plasma chamber. This design minimizes etch yield loss resulting from variations in etch profiles.

Career Highlights

Alan V Hayes is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to apply his innovative ideas in practical settings, contributing to advancements in ion beam technology.

Collaborations

Throughout his career, Alan has collaborated with notable colleagues, including Alexandre Likhanskii and Dmitry Lubomirsky. These collaborations have further enriched his work and led to the development of cutting-edge technologies in the field.

Conclusion

Alan V Hayes is a distinguished inventor whose contributions to ion beam technology have made a significant impact in the industry. His innovative patents and work at Applied Materials, Inc. highlight his commitment to advancing technology in this critical field.