Company Filing History:
Years Active: 2021-2023
Title: The Innovative Contributions of Adam Liron
Introduction
Adam Liron is a notable inventor based in Pleasanton, California. He has made significant contributions to the field of semiconductor processing technology. With a total of 2 patents, Liron's work focuses on enhancing the efficiency and effectiveness of plasma etching processes.
Latest Patents
Liron's latest patents include a "Tunable Upper Plasma-Exclusion-Zone Ring for a Bevel Etcher." This invention features a tunable upper plasma exclusion zone (PEZ) ring that adjusts the distance of plasma during processing in a chamber. The design includes a lower surface with a horizontal portion and an upwardly tapered outer portion that extends outwardly and upwardly. The tunable upper PEZ ring allows for precise adjustments during the treatment of a 300 mm circular substrate. Another patent, also titled "Tunable Upper Plasma-Exclusion-Zone Ring for a Bevel Etcher," describes a bevel etcher designed for cleaning the bevel edge of a semiconductor substrate. This invention incorporates a lower electrode assembly and an upper dielectric component, with a tunable upper PEZ ring that enhances the cleaning process by adjusting the gap between the ring and the substrate.
Career Highlights
Adam Liron is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has positioned him as a key player in advancing plasma etching technologies. Liron's innovative designs have contributed to the efficiency of semiconductor fabrication processes.
Collaborations
Liron collaborates with talented coworkers, including Jack Chen and Gregory Sexton. Their combined expertise fosters a creative environment that drives innovation within their projects.
Conclusion
Adam Liron's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor. His innovative designs continue to shape the future of plasma etching processes in the semiconductor industry.