The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2011
Filed:
Oct. 12, 1995
Barry Gregerson, Deephaven, MN (US);
Brian Wiseman, Oakdale, MN (US);
Gary Gallagher, Austin, TX (US);
Barry Gregerson, Deephaven, MN (US);
Brian Wiseman, Oakdale, MN (US);
Gary Gallagher, Austin, TX (US);
Entegris, Inc., Billerica, MA (US);
Abstract
A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.