The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2010

Filed:

Jul. 14, 2005
Applicants:

David R. Shafer, Fairfield, CT (US);

Alois Herkommer, Aalen, DE;

Karl-heinz Schuster, Konigsbronn, DE;

Gerd Füerter, Ellwangen, DE;

Rudolph Von Büenau, Essingen, DE;

Wilhelm Ulrich, Aalen, DE;

Inventors:

David R. Shafer, Fairfield, CT (US);

Alois Herkommer, Aalen, DE;

Karl-Heinz Schuster, Konigsbronn, DE;

Gerd Füerter, Ellwangen, DE;

Rudolph Von Büenau, Essingen, DE;

Wilhelm Ulrich, Aalen, DE;

Assignee:

Carl Zeiss SMT AG, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 17/00 (2005.12);
U.S. Cl.
CPC ...
Abstract

An objective comprising axial symmetry, at least one curved mirror and at least one lens and two intermediate images. The objective includes two refractive partial objectives and one catadioptric partial objective. The objective includes a first partial objective, a first intermediate a image, a second partial objective, a second intermediate image, and a third partial objective. At least one of the partial objectives is purely refractive. One of the partial objectives is purely refractive and one is purely catoptric.


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