The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2009
Filed:
Nov. 11, 2002
Applicants:
Gerard Van Engelen, Veldhoven, NL;
Cornelis D. Van Dijk, Boxtel, NL;
Johannes M. M. Van Kimmenade, Eil, NL;
Jan Van Eijk, Eindhoven, NL;
Inventors:
Gerard van Engelen, Veldhoven, NL;
Cornelis D. van Dijk, Boxtel, NL;
Johannes M. M. van Kimmenade, Eil, NL;
Jan van Eijk, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2005.12); G03B 27/42 (2005.12); G03B 27/62 (2005.12);
U.S. Cl.
CPC ...
Abstract
A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.