The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2008
Filed:
Mar. 14, 2001
Applicants:
Fumiyoshi Urano, Niiza, JP;
Masaaki Nakahata, Higashimatsuyama, JP;
Hirotoshi Fujie, Kawagoe, JP;
Keiji Oono, Sakado, JP;
Inventors:
Fumiyoshi Urano, Niiza, JP;
Masaaki Nakahata, Higashimatsuyama, JP;
Hirotoshi Fujie, Kawagoe, JP;
Keiji Oono, Sakado, JP;
Assignee:
Wako Pure Chemical Industries, Ltd., Osaka, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C07C 245/12 (2005.12); C07C 245/16 (2005.12);
U.S. Cl.
CPC ...
Abstract
wherein Ris a Cbranched or cyclic alkyl group, and Ris a Cstraight-chain, branched or cyclic alkyl group, is effective as a photoacid generator when used in a photoresist material for light of 300 nm or less.