The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2008
Filed:
Dec. 09, 1999
Wayne L. Johnson, Phoenix, AZ (US);
Wayne L. Johnson, Phoenix, AZ (US);
Tokyo Electron Limited, , JP;
Abstract
A chamber housing () enclosing a plasma region () in a large area plasma source used for performing plasma assisted processes in large area substrates, the chamber housing () being composed of: a housing member () constituting a substantially vertically extending wall () surrounding a space () corresponding to the plasma region (), the housing member () having a plurality of openings () and electrically conductive elements forming an electrostatic shield around the space; a plurality of dielectric members () each having a peripheral edge and each disposed to close a respective opening (); and sealing members (') forming a hermetic seal between said housing member and said peripheral edge of each of said dielectric members ().