The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 12, 2018

Filed:

Oct. 31, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Anirban Basu, Legrangeville, NY (US);

Guy M. Cohen, Ossining, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/205 (2006.01); H01L 29/04 (2006.01); H01L 21/306 (2006.01); H01L 21/02 (2006.01); H01L 29/08 (2006.01); H01L 29/20 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7848 (2013.01); H01L 21/02546 (2013.01); H01L 21/30612 (2013.01); H01L 29/045 (2013.01); H01L 29/0847 (2013.01); H01L 29/20 (2013.01); H01L 29/205 (2013.01); H01L 29/66522 (2013.01); H01L 29/66545 (2013.01); H01L 29/66553 (2013.01); H01L 29/66636 (2013.01); H01L 21/0262 (2013.01); H01L 21/02392 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 29/42376 (2013.01);
Abstract

A semiconductor structure and formation thereof. The semiconductor structure has a first semiconductor layer with a first lattice structure and a second epitaxial semiconductor layer that is lattice-matched with the first semiconductor layer. At least two source/drain regions, which have a second lattice structure, penetrate the second semiconductor layer and contact the first semiconductor layer. A portion of the second semiconductor layer is between the source/drain regions and has a degree of uniaxial strain that is based, at least in part, on a difference between the first lattice structure and the second lattice structure.


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