The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Jan. 28, 2015
Applicant:
Mochii, Inc., Seattle, WA (US);
Inventors:
Christopher Su-Yan Own, Seattle, WA (US);
Matthew Francis Murfitt, Seattle, WA (US);
Assignee:
Mochii, Inc., Seattle, WA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/18 (2006.01); H01J 37/16 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/16 (2013.01); H01J 37/18 (2013.01); H01J 2237/18 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2812 (2013.01);
Abstract
A charged-particle beam microscope includes a charged-particle beam source to generate a charged-particle beam. A stage is provided to hold a sample in the path of the charged-particle beam. Beam optics are provided to illuminate the sample with the charged-particle beam. One or more detectors are provided to detect radiation emanating from the sample as a result of the illumination. A controller may control one or more of the beam optics, stage, and detectors to generate an image of the sample based on the detected radiation.