The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Dec. 08, 2016
Applicant:
Jeol Ltd., Tokyo, JP;
Inventors:
Assignee:
JEOL Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/153 (2006.01); H01J 37/26 (2006.01); H01J 37/22 (2006.01); H01J 37/10 (2006.01); H01J 37/147 (2006.01);
U.S. Cl.
CPC ...
H01J 37/153 (2013.01); H01J 37/10 (2013.01); H01J 37/1474 (2013.01); H01J 37/22 (2013.01); H01J 37/26 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/182 (2013.01);
Abstract
There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube () is disposed inside the electron optical column () of an electron microscope (). The interior of the tube () forms a path for the electron beam (EB). The liner tube () has a first cylindrical member () that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.