The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 12, 2018

Filed:

Apr. 20, 2015
Applicant:

Nissan Chemical Industries, Ltd., Tokyo, JP;

Inventors:

Hitoshi Furusho, Funabashi, JP;

Yuki Nohara, Funabashi, JP;

Hisayuki Watanabe, Toyama, JP;

Yuichi Goto, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08J 3/28 (2006.01); H01L 21/02 (2006.01); H01L 21/225 (2006.01); H01L 31/0288 (2006.01); H01L 31/18 (2006.01); H01L 31/20 (2006.01); B01J 19/08 (2006.01);
U.S. Cl.
CPC ...
C08J 3/28 (2013.01); B01J 19/081 (2013.01); B01J 19/087 (2013.01); H01L 21/0242 (2013.01); H01L 21/02532 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/02592 (2013.01); H01L 21/02628 (2013.01); H01L 21/2254 (2013.01); H01L 31/0288 (2013.01); H01L 31/182 (2013.01); H01L 31/20 (2013.01); C08J 2383/16 (2013.01); H05H 2245/123 (2013.01); Y02E 10/546 (2013.01); Y02P 70/521 (2015.11);
Abstract

Described is a doping technique that forms a stable amorphous silicon film and a stable polycrystalline silicon film at a low temperature and simultaneously that imparts conductivity in an atmospheric pressure environment. A method for producing a compound containing a bond between different elements belonging to Group 4 to Group 15 of the periodic table, the method including: applying, at a low frequency and atmospheric pressure, high voltage to an inside of an electric discharge tube obtained by attaching high-voltage electrodes to a metal tube or an insulator tube or between flat plate electrodes while passing an introduction gas, so as to convert molecules present in the electric discharge tube or between the flat plate electrodes into a plasma; and applying the plasma to substances to be irradiated, the substances to be irradiated being two or more elementary substances or compounds.


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