The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
Feb. 19, 2015
Lasertec Corporation, Yokohama, Kanagawa, JP;
Kiwamu Takehisa, Kanagawa, JP;
Jun Sakuma, Kanagawa, JP;
Lasertec Corporation, Yokohama, JP;
Abstract
A laser light source device having a simple configuration and an inspection device are provided. A laser light source deviceaccording to an exemplary embodiment in accordance with the present invention has a repetition frequency of 1 MHz or higher, and includes fundamental wave generation meansfor oscillating laser light including a fundamental wave with its center wavelength being included in one of first to fourth wavelength bands, and meansfor generating a sixth harmonic of pulsed laser light extracted from the fundamental wave generation means. The first wavelength band is 1064.326 nm to 1064.511 nm. The second wavelength band is 1064.757 nm to 1064.852 nm. The third wavelength band is 1063.805 nm to 1063.878 nm. Further, the fourth wavelength band is 1063.962 nm to 1064.031 nm.