The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
May. 16, 2017
Infineon Technologies Americas Corp., El Segundo, CA (US);
Robert Haase, San Pedro, CA (US);
Timothy Henson, Mount Shasta, CA (US);
Infineon Technologies Americas Corp., El Segundo, CA (US);
Abstract
A power semiconductor device includes a semiconductor substrate having a drift region, a gate electrode trench in the semiconductor substrate and a field electrode needle trench in the semiconductor substrate. The gate electrode trench extends into the drift region and includes a gate electrode. The gate electrode is arranged in the gate electrode trench and electrically insulated from the drift region by a gate dielectric layer arranged between the gate electrode and the drift region. The field electrode needle trench is laterally spaced from the gate electrode trench and extends into the drift region. The field electrode needle trench includes a field electrode arranged in the field electrode needle trench and electrically insulated from the drift region by a cavity formed between the field electrode and the drift region.