The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
Mar. 18, 2015
Applicants:
International Business Machines Corporation, Armonk, NY (US);
Renesas Electronics Corporation, Kanagawa, JP;
Inventors:
Hong He, Schenectady, NY (US);
Shogo Mochizuki, Tokyo, JP;
Chiahsun Tseng, Wynantskill, NY (US);
Chun-Chen Yeh, Clifton Park, NY (US);
Yunpeng Yin, Schenectady, NY (US);
Assignees:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
RENESAS ELECTRONICS CORPORATION, Kanagawa, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 29/04 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/8234 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0886 (2013.01); H01L 21/0257 (2013.01); H01L 21/02271 (2013.01); H01L 21/30604 (2013.01); H01L 21/823431 (2013.01); H01L 21/823437 (2013.01); H01L 21/823481 (2013.01); H01L 29/045 (2013.01); H01L 29/0649 (2013.01); H01L 29/0653 (2013.01); H01L 29/0847 (2013.01); H01L 29/6681 (2013.01); H01L 29/66545 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 29/7851 (2013.01);
Abstract
Semiconductor devices having non-merged fin extensions. A semiconductor device includes fins formed in trenches in an insulator layer, each of the fins having a uniform crystal orientation and a fin cap in a source and drain region that extends vertically and laterally beyond the trench. The fin caps of the respective fins are separate from one another.