The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
May. 16, 2016
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Nicolas Abele, Demoret, CH;
Faouzi Khechana, Preverenges, CH;
Julien Gamet, Saint Pierre d'Allevard, FR;
Assignee:
INTEL CORPORATION, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 3/0072 (2013.01); G02B 26/085 (2013.01); G02B 26/101 (2013.01); G02B 26/105 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/0181 (2013.01); B81B 2203/06 (2013.01);
Abstract
According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.