The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Sep. 09, 2013
Applicant:
Inficon Gmbh, Bad Ragaz, CH;
Inventors:
Martin Wüest, Malans, CH;
Christian Berg, Stafa, CH;
Assignee:
INFICON GMBH, Bad Ragaz, CH;
Primary Examiner:
Int. Cl.
CPC ...
G01L 27/00 (2006.01); G01L 21/02 (2006.01); G01L 9/00 (2006.01); G01L 13/02 (2006.01); G01L 21/00 (2006.01); G01M 99/00 (2011.01);
U.S. Cl.
CPC ...
G01L 21/02 (2013.01); G01L 9/0072 (2013.01); G01L 9/0075 (2013.01); G01L 13/025 (2013.01); G01L 21/00 (2013.01); G01M 99/00 (2013.01);
Abstract
Vacuum pressure of a gas in a compartment () is measured. The vacuum pressure is established by a pump arrangement () with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment () is exploited () as an indication of the operation status of the pump arrangement ().