The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Dec. 16, 2014
Applicant:
Cabot Corporation, Boston, MA (US);
Inventors:
Brian G. Prevo, Portland, OR (US);
Mark J. Hampden-Smith, Chelmsford, MA (US);
Dmitry Fomitchev, Lexington, MA (US);
Yakov E. Kutsovsky, Arlington, MA (US);
Assignee:
Cabot Corporation, Boston, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/16 (2006.01); C09G 1/02 (2006.01); C08K 3/36 (2006.01); C08F 130/08 (2006.01); C09K 3/14 (2006.01); B24B 37/04 (2012.01); B24B 37/24 (2012.01); C09G 1/18 (2006.01);
U.S. Cl.
CPC ...
C09G 1/16 (2013.01); B24B 37/044 (2013.01); B24B 37/245 (2013.01); C08F 130/08 (2013.01); C08K 3/36 (2013.01); C09G 1/02 (2013.01); C09G 1/18 (2013.01); C09K 3/1436 (2013.01); C09K 3/1445 (2013.01); C09K 3/1463 (2013.01);
Abstract
CMP processes, tools and slurries utilize metal oxide-polymer composite particles that include metal oxide particles and a polymer core. The metal oxide particles are modified with a modifying agent and are partially or fully embedded within the polymer core. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.