The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 29, 2018

Filed:

Aug. 04, 2014
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Taiki Sawabe, Tokyo, JP;

Assignee:

Disco Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2014.01); B23K 26/067 (2006.01); H01L 21/428 (2006.01); H01L 21/463 (2006.01); B23K 26/00 (2014.01); B23K 26/40 (2014.01); H01L 33/00 (2010.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/067 (2013.01); B23K 26/0057 (2013.01); B23K 26/0608 (2013.01); B23K 26/0648 (2013.01); B23K 26/0676 (2013.01); B23K 26/40 (2013.01); H01L 21/428 (2013.01); H01L 21/463 (2013.01); B23K 2203/50 (2015.10); H01L 33/005 (2013.01);
Abstract

A laser processing apparatus includes a beam splitting unit disposed between a pulsed laser beam oscillating unit and a condenser. The beam splitting unit includes a half-wave plate that rotates the plane of polarization of a pulsed laser beam, a birefringent lens that splits the pulsed laser beam that has passed through the half-wave plate into ordinary light and extraordinary light, the birefringent lens being formed by joining two kinds of crystalline bodies to each other across a curved plane of a concave surface and a convex surface, and a splitting angle adjusting unit that moves the birefringent lens in a direction orthogonal to the pulsed laser beam that has passed through the half-wave plate to change the angle of incidence with respect to the curved plane and adjust a beam splitting angle.


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