The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Mar. 31, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Brian Roberts Routh, Jr., Beaverton, OR (US);
Thomas G. Miller, Portland, OR (US);
Chad Rue, Portland, OR (US);
Noel Thomas Franco, Hillsboro, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); C23C 14/22 (2006.01); G01N 1/32 (2006.01); H01J 37/305 (2006.01); C23C 14/30 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02266 (2013.01); C23C 14/221 (2013.01); G01N 1/32 (2013.01); H01J 37/3056 (2013.01); H01L 21/02164 (2013.01); H01L 21/02362 (2013.01); C23C 14/30 (2013.01); H01J 2237/3174 (2013.01); H01J 2237/31744 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/31749 (2013.01); H01L 21/02214 (2013.01);
Abstract
A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.