The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Dec. 18, 2014
Asml Netherlands B.v., Veldhoven, NL;
Hans Butler, Best, NL;
Cornelius Adrianus Lambertus De Hoon, Eindhoven, NL;
Ingmar August Kerp, Eindhoven, NL;
Pieter Johannes Gertrudis Meijers, Horst, NL;
Jeroen Pieter Starreveld, Eindhoven, NL;
Derk Ten Hoopen, Veldhoven, NL;
Martinus Van Duijnhoven, Deurne, NL;
Edward Hage, Helmond, NL;
Evert Hendrik Jan Draaijer, Eindhoven, NL;
Wesley Ooms, Geldrop, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A support device configured to support a first part relative to a second part, minimizing the transfer of vibration between the two parts, includes a supporting system configured to use gas under pressure to provide a support force between the first and second parts; a gas chamber connected to the supporting system and configured to contain the gas under pressure and provide the gas under pressure to the supporting system; and a section of acoustic damping material, arranged at a location within the gas chamber so as to separate a first gas containing region and a second gas containing region within the gas chamber, wherein the section of acoustic damping material has a first side and a second side, wherein the first gas containing region is on the first side and the second gas containing region is on the second side.