The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Nov. 10, 2014
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Yim-Bun Patrick Kwan, Aalen, DE;
Erik Ruinemans, Eindhoven, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical imaging arrangement includes an optical projection system and a support structure system. The optical projection system includes a group of optical elements configured to transfer, in an exposure process using exposure light along an exposure light path, an image of a pattern of a mask onto a substrate. The support structure system includes an optical element support structure and a metrology support structure. The optical element support structure supports the group of optical elements, while the metrology support structure supports a group of metrology devices associated with the group of optical elements and configured to capture status information representative of at least one of a position and an orientation of each of the optical elements in at least one degree of freedom up to all six degrees of freedom.