The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Aug. 03, 2015
Applicant:
Mikro Mesa Technology Co., Ltd., Apia, WS;
Inventors:
Li-Yi Chen, Tainan, TW;
Pei-Yu Chang, Tainan, TW;
Chih-Hui Chan, Tainan, TW;
Chun-Yi Chang, Tainan, TW;
Shih-Chyn Lin, Tainan, TW;
Hsin-Wei Lee, Tainan, TW;
Assignee:
MIKRO MESA TECHNOLOGY CO., LTD., Apia, WS;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 7/00 (2006.01); B25J 15/00 (2006.01); H01L 21/683 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
B25J 7/00 (2013.01); B25J 15/008 (2013.01); B25J 15/0052 (2013.01); B25J 15/0085 (2013.01); H01L 21/6833 (2013.01); H01L 21/6835 (2013.01); H01L 24/95 (2013.01); H01L 2221/68354 (2013.01); H01L 2221/68368 (2013.01); H01L 2224/75725 (2013.01); H01L 2224/95001 (2013.01);
Abstract
A transfer head array includes a body and a plurality of transfer heads. The body has a first surface, a second surface opposite to the first surface, and a plurality of recesses. The first surface has at least one chucking region and at least one interference avoidance region, and the recesses are separated from each other and are disposed in the interference avoidance region. The transfer heads are disposed on the chucking region.