The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2018

Filed:

Mar. 26, 2013
Applicant:

Mitsubishi Materials Corporation, Tokyo, JP;

Inventors:

Hiroshi Tanaka, Naka, JP;

Hitoshi Inaba, Naka, JP;

Kazuta Takeshima, Naka, JP;

Noriaki Nagatomo, Naka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 7/00 (2006.01); G01K 7/22 (2006.01); H01C 7/04 (2006.01); H01C 7/00 (2006.01);
U.S. Cl.
CPC ...
G01K 7/226 (2013.01); G01K 7/22 (2013.01); H01C 7/008 (2013.01); H01C 7/04 (2013.01);
Abstract

Provided is a temperature sensor which does not easily cause a crack in a Ti—Al—N-based thermistor material layer when the film is bent, can be directly deposited on a film or the like without firing, and has a high reliability with a high heat resistance. The temperature sensor includes an insulating film, a thin film thermistor portionmade of a Ti—Al—N-based thermistor material formed on the insulating film, a pair of pattern electrodesformed on the insulating film with a pair of opposed electrode portionsbeing arranged so as to be opposed to each other on the thin film thermistor portion, wherein the pair of opposed electrode portions covers the entire surface of thin film thermistor portion excluding the region between the opposed electrode portions.


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