The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Aug. 17, 2017
Globalfoundries Inc., Grand Cayman, KY;
Hui Zang, Guilderland, NY (US);
Josef Watts, Saratoga Springs, NY (US);
Ruilong Xie, Niskayuna, NY (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Methods of forming a self-aligned CT pillar with the same CD width as the device fins to enable PC isolation and the resulting devices are provided. Embodiments include forming a plurality of fins over a substrate; forming an oxide layer over the substrate and between each fin; removing a portion of a central fin among the plurality, a trench formed in the oxide layer; forming a CT pillar in the trench; recessing the oxide layer below an upper surface of the plurality of fins; forming a gate over the plurality of fins and CT pillar; planarizing the gate down to the CT pillar; and forming a cap layer over the gate and CT pillar.