The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Jun. 17, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Eric Gerardus Theodoor Bosch, Eindhoven, NL;
Ivan Lazic, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G06T 11/00 (2006.01); G01N 23/04 (2018.01); G01T 1/17 (2006.01); G02B 21/00 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
G06T 11/003 (2013.01); G01N 23/04 (2013.01); G01T 1/17 (2013.01); G02B 21/008 (2013.01); G06T 11/00 (2013.01); H01J 37/222 (2013.01); G01N 2223/419 (2013.01);
Abstract
A method and apparatus for ptychographic imaging is described. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. By using calculation planes with more nodes (for example 512×512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32×32 pixel detector. Although the reconstructed object shows less resolution ('sharpness'), all features are there.