The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Mar. 03, 2016
Applicant:
Applied Materials Israel Ltd., Rehovot, IL;
Inventors:
Assignee:
APPLIEED MATERIALS ISRAEL LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01R 31/305 (2006.01); G01R 1/07 (2006.01); G01R 1/18 (2006.01);
U.S. Cl.
CPC ...
G01R 31/305 (2013.01); G01R 1/07 (2013.01); G01R 1/18 (2013.01);
Abstract
A system for electrically testing an object, the system may include a scanning electron microscope that comprises a column; and nano-probe modules that are mechanically connected to the column; wherein the column is configured to illuminate areas of the object, with a beam of charged particles; wherein nano-probes of the nano-probe modules are configured to electrically contact elements of the object, during electrical tests of the object, wherein the elements of the object are located within the areas of the object.