The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Aug. 03, 2015
Sho Nagai, Kanagawa, JP;
Kensuke Masuda, Kanagawa, JP;
Go Maruyama, Kanagawa, JP;
Yuji Yamanaka, Tokyo, JP;
Naohiro Kamijo, Kanagawa, JP;
Kenji Kagitani, Kanagawa, JP;
Sho Nagai, Kanagawa, JP;
Kensuke Masuda, Kanagawa, JP;
Go Maruyama, Kanagawa, JP;
Yuji Yamanaka, Tokyo, JP;
Naohiro Kamijo, Kanagawa, JP;
Kenji Kagitani, Kanagawa, JP;
RICOH COMPANY, LTD., Tokyo, JP;
Abstract
A specimen measuring device includes: a light source device that irradiates a specimen surface of a specimen with illumination light from multiple illumination units at a plurality of illumination angles; a spectral camera device that is arranged above the specimen surface, spectrally separates reflected light from the specimen surface, and acquires 2D spectral information through a single image capturing operation; and a calculating unit that calculates deflection angle spectral information of the specimen surface used to measure a measurement value of a certain evaluation item of the specimen using a change in an optical geometrical condition of an illumination direction and an image capturing direction between pixels in an X axis direction and a Y axis direction of the spectral information.