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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9957340 B1

PDFFull Text
Date of Patent:
May. 01, 2018

Filed:

Nov. 26, 2013

Imprinting method and curable composition for imprinting

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Keiko Chiba, Utsunomiya, JP;

Toshiki Ito, Kawasaki, JP;

Akiko Iimura, Utsunomiya, JP;

Youji Kawasaki, Utsunomiya, JP;

Keiji Yamashita, Utsunomiya, JP;

Jun Kato, Yokohama, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Canon U.S.A. Inc., IP Division

Primary Examiner:

William P Fletcher, III

Int. Cl.
CPC ...
H01L 21/027 (2006.01); C08F 20/18 (2006.01); B29C 59/02 (2006.01); C08F 222/20 (2006.01); C08F 222/10 (2006.01); B29C 59/00 (2006.01); B29C 59/16 (2006.01); G03F 7/028 (2006.01); G03F 7/029 (2006.01); C08F 220/18 (2006.01); C09D 133/08 (2006.01); C08L 33/08 (2006.01); G03F 7/00 (2006.01); G03F 7/027 (2006.01); B29K 33/04 (2006.01); B29L 11/00 (2006.01); B29L 31/34 (2006.01); B29K 33/00 (2006.01);
U.S. Cl.
CPC ...
C08F 222/20 (2013.01); B29C 59/005 (2013.01); B29C 59/02 (2013.01); B29C 59/022 (2013.01); B29C 59/16 (2013.01); C08F 220/18 (2013.01); C08F 222/10 (2013.01); C08F 222/1006 (2013.01); C08L 33/08 (2013.01); C09D 133/08 (2013.01); G03F 7/0002 (2013.01); G03F 7/027 (2013.01); G03F 7/028 (2013.01); G03F 7/029 (2013.01); B29K 2033/12 (2013.01); B29L 2011/00 (2013.01); B29L 2031/3406 (2013.01); C08F 2222/1013 (2013.01); C08L 2312/00 (2013.01);
Abstract

An imprinting method for forming a pattern of a cured product by irradiating a curable composition for imprinting disposed on a substrate with light while the curable composition is in contact with a mold having surface asperities and removing the mold from a cured product of the curable composition. The method includes bringing the mold into contact with the curable composition in a condensable gas atmosphere, wherein the curable composition for imprinting has a viscosity in the range of 1 cP to 40 cP in air at 23° C., and the condensable gas is introduced between the mold and the curable composition such that the curable composition for imprinting has a condensable gas solubility (gas/(curable composition+gas)) (g/g) in the range of 0.1 to 0.4.

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