The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2018

Filed:

Jan. 14, 2016
Applicant:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Inventors:

Herb He Huang, Shanghai, CN;

Haiting Li, Shanghai, CN;

Jiguang Zhu, Shanghai, CN;

Clifford Ian Drowley, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 21/306 (2006.01); H01L 21/304 (2006.01); H01L 21/265 (2006.01); H01L 21/683 (2006.01); H01L 21/762 (2006.01); H01L 23/48 (2006.01); H01L 29/06 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823481 (2013.01); H01L 21/26506 (2013.01); H01L 21/304 (2013.01); H01L 21/3046 (2013.01); H01L 21/30604 (2013.01); H01L 21/30608 (2013.01); H01L 21/30625 (2013.01); H01L 21/6835 (2013.01); H01L 21/76224 (2013.01); H01L 23/481 (2013.01); H01L 29/0649 (2013.01); H01L 27/088 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68327 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method of forming a semiconductor device includes: providing a first substrate, forming at least one transistor on a first surface of the first substrate; forming a first dielectric cap layer covering the first surface of the first substrate; forming a first interconnect structure on the first dielectric cap layer; providing a carrier substrate; bonding the carrier substrate to the first substrate through the first dielectric cap layer; and from a second surface of the first substrate opposite to the first surface, thinning the first substrate to a second depth.


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