The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2018
Filed:
Jun. 13, 2014
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Junhua Ding, Boxborough, MA (US);
Kaveh H. Zarkar, Andover, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/00 (2006.01); G01F 1/80 (2006.01); G01F 5/00 (2006.01); G01F 25/00 (2006.01);
U.S. Cl.
CPC ...
G01F 1/80 (2013.01); G01F 5/00 (2013.01); G01F 25/00 (2013.01); G01F 25/0038 (2013.01); G01F 25/0053 (2013.01);
Abstract
This disclosure relates to mass flow verification systems for and methods of measuring and verifying the mass flow through a mass flow delivery/measurement device such as a mass flow controller. A mass flow verification system comprises a preset volume, a temperature sensor, and a pressure sensor. The measured verified flow determined by the mass flow verification system can be adjusted to compensate for errors resulting from a dead volume within the mass flow measurement device.