The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2018
Filed:
Mar. 29, 2012
Stephen M. Fisher, San Jose, CA (US);
Robindranath Banerjee, San Jose, CA (US);
Christopher L. Beaudry, San Jose, CA (US);
Brian J. Brown, Palo Alto, CA (US);
Stephen M. Fisher, San Jose, CA (US);
Robindranath Banerjee, San Jose, CA (US);
Christopher L. Beaudry, San Jose, CA (US);
Brian J. Brown, Palo Alto, CA (US);
ALTA DEVICES, INC., Sunnyvale, CA (US);
Abstract
A method and system for polishing a plurality of workpieces is disclosed. The method and system comprises providing a polishing tool with multiple polishing heads; and providing a substrate tray that can hold the plurality of work pieces in a fixed position on a tray underneath the polishing heads. The system and method includes moving the tray within the polisher. Finally, the method and system includes configuring the multiple polishing heads with the appropriate pad/slurry combinations to polish the workpieces and to create a finished polished surface on the plurality of work pieces.